OSA Proceedings on Soft X-ray Projection Lithography Volume 18, proceedings of the Topical Meeting, April10-12, 1991, Monterey, California
- Författare
- (Edited by Andrew M. Hawryluk and Richard H. Stulen sponsored by the Optical Society of America.)
- Genre
- Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Optical Society of America | 1993 | USA, Washington, D.C | x, 226 sidor illustrationer 29 cm | 978-1-55752-304-4 |